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SCIENTIA SINICA Informationis, Volume 46, Issue 11: 1662-1675(2016) https://doi.org/10.1360/N112016-00082

A TDC-based method for nano-scale displacement measurement and its error analysis

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  • ReceivedApr 7, 2016
  • AcceptedJul 1, 2016
  • PublishedNov 4, 2016

Abstract

The innovation and improvement of nano-scale measurement methods and devices are driving the rapid development of nano-technology. One of the most important foundations of micro-manipulation is the accurate measurement of micro-and nano-displacement. This paper focuses on the measurement of end effectors for a nano-manipulation robot, which operates in the vacuum chamber of a scanning electron microscope. A standard capacitor is charged and discharged through a strain gauge, and the time is measured by a time-digital convertor to calculate the displacement. The error and power consumption are analyzed and compared with a traditional Wheatstone bridge. The power consumption is greatly reduced by optimizing the error; thus, it takes advantage of the vacuum environment, in which heat dissipation is difficult to achieve. The drift, precision, resolution, and linearity are tested, and demos of closed-loop control and repeated micro-unit probing are provided to verify the validity of this method.


Funded by

国家自然科学基金(61473295)

国家自然科学基金(61528304)

国家自然科学基金(71401189)

北京市自然科学基金(4152054)


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