SCIENTIA SINICA Informationis, Volume 46, Issue 8: 1108-1135(2016) https://doi.org/10.1360/N112016-00083

Micro/Nano-scale integrated circuits and new emerging hybrid integration techniques

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  • ReceivedApr 5, 2016
  • AcceptedMay 31, 2016


As Moore's law advances, the integrated circuit (IC) industry is facing both unprecedented technical challenges and bottlenecks and good opportunities for development. This paper focuses on the innovative micro/nano-scale IC industry and the new hybrid integration technology. To this end, an extensive and profound survey of the current research status and trends in low power micro/nano-scale devices and circuits, nano-scale single-chip systems, MEMS/NEMS, and hybrid integration techniques is presented. In addition, a comprehensive roadmap for theoretical innovations and technical development of post-Moore era IC technology is given and a new roadmap for emerging application-driven IC products outlined.


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