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SCIENCE CHINA Information Sciences, Volume 63 , Issue 12 : 229401(2020) https://doi.org/10.1007/s11432-019-2700-1

High-quality and large-grain epi-like Si film by NiSi$_{2}$-seed initiated lateral epitaxial crystallization (SILEC)

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  • ReceivedSep 9, 2019
  • AcceptedNov 9, 2019
  • PublishedJun 28, 2020

Abstract

There is no abstract available for this article.


Acknowledgment

This work was supported in part by National 02 Major Project (Grant No. 2017ZX02315- 001-004), National Key Research and Development Plan (Grant No. 2016YFA0200504), Program of National Natural Science Foundation of China (Grant No. 61421005), and the 111 Project (Grant No. B18001).


References

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  • Figure 1

    (Color online) (a) Schematic of the SILEC sample after Ni pads patterning; (b) micro-Raman mapping of SPC, MILC, and SILEC samples (only the left half of the dumbbell-shaped structure is shown); (c) low magnification cross-sectional transmission electron microscope (XTEM) image of the SILEC sample cut off along B-B' in (b) by focused ion beam (FIB); (d) high magnification XTEM, selected area fast Fourier transform (SAFFT) and energy dispersive X-ray (EDX) mapping at the region marked as “1" in (c); (e) high magnification XTEM, SAFFT and EDX mapping at the region marked as “2" in (c).

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